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Capabilities

OAI Model 204IR Mask Aligner

This manual mask aligner is capable of frontside alignment and backside alignment (using transmitted IR light). The aligner has soft contact, hard contact, and vacuum contact modes. The tool has a 350 Watt I-line Near UV lamp calibrated to 20 mW/cm^2 intensity at I-line (365 nm). Additional energy will be present at h-line and g-line bringing the total NUV exposure intensity to approximately 45 mW/cm2 (uncalibrated). It accepts 4" (100 mm) wafers and 5" (125 mm) x 5" (125 mm) x 0.09" glass masks.

This tool requires training and formal checkout with the faculty supervisor before you may operate it unsupervised. Read the SOP (see below). Then contact a qualified user and ask to observe tool operation. When you are comfortable with tool operation, contact Prof. White and arrange a formal checkout procedure. Once checked out, you are welcome to use the tool unsupervised.

Contacts: Robert White, Jim Vlahakis


Related Standard Operating Procedures: