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Angstrom NexDep DC/RF Sputter System
The NexDep sputter system is a dual gun sputter-up system with
both DC and RF power supplies. Either gun can be run in DC mode
sequentially (not at the same time). One gun can be run in RF mode.
It is possible to co-sputter with one gun in DC mode and one gun in
RF mode. The platen is heated. The standard sputtering gas in Argon.
Reactive sputtering is also available with nitrogen delivered via a
gas ring near the platen, and oxygen delivered via a wall port.
Closed loop pressure control is maintained.
Contacts: Robert White, James Vlahakis, Daniella Torres
Related Standard Operating Procedures:
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