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Capabilities

Ocean Optics Nanocalc Film Thickness Measurement

A UV-VIS reflectance-type spectrometer (Ocean Optics Nanocalc) is available. This tool is capable of measuring film thickness of semi-transparent thin films (oxide, nitride, polymer, polysilicon) using a UV-VIS spectrometer and model fitting.

This tool does not require a formal checkout. Use the tool with another user to become familiar with operation before you use it yourself.

Contacts: Robert White


Related Standard Operating Procedures: