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Karl Suss MA6 Mask Aligner
The Suss MA6 contact aligner is a 350 W mercury lamp UV source
contact aligner for performing photolithography. This MA6 is top
side alignment only. The exposure source is controlled in constant
intensity mode to 15 mW/cm2 at I-line (365 nm). Additional energy
will be present at h-line and g-line bringing the total NUV exposure
intensity to approximately 45 mW/cm2 (uncalibrated). The aligner can
be operated in proximity, soft contact, hard contact, or vacuum
contact modes. It accepts 4" (100 mm) wafers and 5" (125 mm) x 5"
(125 mm) x 0.09" glass masks.
Contacts: Robert White, James Vlahakis, Daniella Torres
Related Standard Operating Procedures:
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