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Ph.D., B.S. (Mechanical Engineering), Tufts University, 2008,
James Vlahakis earned his Ph.D. and B.S. in mechanical engineering from Tufts University and his M.S. in mechanical engineering from Harvard. He returned to Tufts from his role as a process development engineer at Intel Corp. He has experience in academic, industrial and government environments, in a number of areas – micro and nano fabrication, ion beam operations and applications and medical device testing and regulation. The Tufts Micro/Nano Fabrication Lab is a multi-user, multi-PI, multi department core facility that enables micro/nano scale research for all Tufts campuses and Dr. Vlahakis is responsible for all operational aspects of the facility. In addition, he regularly contributes to micro/nano research programs that cross numerous fields – flexible devices, MEMS sensors, bio-optics, etc.
Dr. Vlahakis' research interests include:
2013-present Lab Manager/Researcher, Tufts Micro/Nano
Honors, Awards & Invited Talks
2008 Invited Lecturer, Advances in CMP, MIT Lincoln Labs
Kelley, P., Saigal, A., Vlahakis, J., Carter, A., "Tensile and Fatigue Behavior of Direct Metal Laser Sintered Inconel 718," ASME International Congress and Exposition 2015.
Beyer, G., Finkelman, M., Harsono, Vlahakis, J., M., Kugel, G., Perry, R., "Assessing Surface Roughness on Composite Restorations Using Differing Abrasive Products", International Association of Dental Research, Proceedings, 2013.
Metallo, C., Trimmer B., Vlahakis J., "Flexible Parylene-Based Multi Electrode Arrays for Surface EMG Recordings from Facial Muscles", IEEE Conference for Engineering in Medicine and Biology, 2012.
Vlahakis, J., Manno, V. P., Rogers, C. B., and White, R. "Stick-Slip Transitions in Chemical Mechanical Planarization", Electrochemical and Solid-State Letters, 13(6), H206-H208, 2010.
Vlahakis, J., Rogers, C., Manno, V., White, R., Moinpur, M., Hooper, D., and Anjur, S., "Synchronous, In Situ Measurements in Chemical Mechanical Planarization", Journal of the Electrochemical Society, 156 (10), H794-H802, 2009.
Shin, M., Vlahakis, J., Manno, V. P., Rogers, C. B., Paul, E., Moinpour, M., Hooper, D., and White, R. D. "In Situ Metrology for Glass and Copper CMP" in Proceedings of the International Conference on Planarization/CMP Technology, ICPT 2009, Fukuoka, Japan, Nov. 19-21, 2009.
White, R., Vlahakis, J., Gray, C., Manno, V., Braun, N., Gauthier, D., Mueller, A., Rogers, C. and Moinpour, M. "In Situ Characterization of the Mechanical Aspects of CMP" in the Proceedings of the International Conference on Planarization/CMP Technology 2008, Hsinchu, Taiwan, November 10-12, 2008.
N. Braun, C. Gray, A. Mueller, J. Vlahakis, D. Gauthier, V. P. Manno, C. Rogers, R. White, S. Anjur, M. Moinpour. "In-Situ Investigation of Wafer-Slurry-Pad Interactions during CMP" in the Proceedings of the International Conference on Planarization/CMP Technology, Dresden, Germany, October 25-27, 2007.
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