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Miller FPP-5000 Four Point Resistivity Probe

The FPP-5000 4-Point Probe simplifies the measurement of resistive properties of semiconductor wafers and resistive films. The microprocessor based electronics permits direct computation of V/I, sheet or slice resistivity, metallization thickness and P-N type testing.

No checkout is required. Check with other lab users to make sure you are using the tool correctly.

Contacts: Robert White, Sam MacNaughton

Related Standard Operating Procedures: