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OAI Model 204IR Mask Aligner
This manual mask aligner is capable of frontside alignment and
backside alignment (using transmitted IR light). The aligner has
soft contact, hard contact, and vacuum contact modes. The tool has a
350 Watt I-line Near UV lamp calibrated to 20 mW/cm^2 intensity at
I-line (365 nm). Additional energy will be present at h-line and g-line
bringing the total NUV exposure intensity to approximately 45 mW/cm2 (uncalibrated).
It accepts 4" (100 mm) wafers and 5" (125 mm) x 5" (125 mm) x 0.09" glass masks.
Contacts: Robert White, Jim Vlahakis
Related Standard Operating Procedures:
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