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Tegal Plasmod Oxygen Plasma Cleaner

This Oxygen plasma cleaner has a 4" diameter chamber (it can fit a single 4" diameter substrate). Generally, oxygen plasmas are used for removing organic residues and oxidizing surfaces. It is a RF Oxygen plasma cleaner with a 100 W power supply. Processing generally occurs between 100 mTorr and 300 mTorr. Manual control of pumps, gas flow, power, and RF tuning. There are no restrictions on the materials that can go into this tool.

Contacts: Robert White

Related Standard Operating Procedures: