Rates

*Hourly rates as of May 1, 2025 through July 9, 2025. See 'Important Notes' below, for detailed information.

Instrument: Angstrom NexDep Sputter ^{(5, 7)}
Rate: $40.00 per hour ⁽³⁾

Instrument: NSC3000 Sputter ^{(5, 6)}
Rate: $65.00 per hour ⁽³⁾

Instrument: Cambridge Nanotech Savannah ALD ⁽⁸⁾
Rate: $45.00 per hour ⁽³⁾

Instrument: March Reactive Ion Etcher
Rate: $40.00 per hour ⁽³⁾

Instrument: LC Tech Thermal Evaporator ⁽⁵⁾
Rate: $50.00 per hour ⁽³⁾

Instrument: Denton Ebeam Evaporator ⁽⁹⁾
Rate: $40.00 per hour ⁽³⁾

Instrument: Laurell Spinner - CLEAN ⁽⁴⁾
Rate: $15.00 per hour ⁽³⁾

Instrument: Laurell Spinner - DIRTY ⁽⁴⁾
Rate: $15.00 per hour ⁽³⁾

Instrument: Suss MA6 Mask Aligner ⁽⁴⁾
Rate: $55.00 per hour ⁽³⁾

Instrument: OAI 204IR Mask Aligner ⁽⁴⁾
Rate: $45.00 per hour ⁽³⁾

Instrument: Tescan VEGA3 SEM - EBL ⁽⁴⁾
Rate: $75.00 per hour ⁽³⁾

Instrument: PDS 2010 Parylene Coater ⁽¹⁰⁾
Rate: $200.00 per run ⁽³⁾

Instrument: Dicing Saw ⁽⁹⁾
Rate: $30.00 per hour ⁽³⁾

Instrument: Wire Bonder
Rate: $40.00 per hour ⁽³⁾

Instrument: Solaris RTP
Rate: $45.00 per hour ⁽³⁾

Instrument: MEI 1204B Ball Bonder
Rate: $45.00 per hour

Instrument: DekTak XT Profilometer
Rate: $30.00 per hour ⁽³⁾

Instrument: Miller FPP-5000 4-Point Probe
Rate: $10.00 per hour ⁽³⁾

Instrument: Ocean Optics Thin Film Spectrometer
Rate: $40.00 per hour ⁽³⁾

Instrument: Inspection Microscope with Image Capture
Rate: $0.00 

Instrument: Tescan VEGA3 SEM - Imaging
Rate: $50.00 per hour ⁽³⁾

Instrument: Zygo NewView 600s Interferometer
Rate: $40.00 ⁽³⁾

General access charge: $40 per day, maximum charge ⁽³⁾

Important Notes

1. Rates are subject to change without notice
2. Missed reservations may result in a penalty charge
3. These rates apply to internal Tufts users
   • External academic users are charged 1.35x the internal rates
   • External non-academic users are charged 2.5x the internal rates
4. Tufts supplies standard resists and developers, users must supply substrates and masks if necessary
5. Material restrictions apply, contact us for details
6. Tufts supplied deposition materials – Ag, Al, Au, Cr, Cu, Ge, Ni, Sn, Ti, Zn user supplied must be pre-approved
7. Tufts supplied deposition materials – SiO2, Al, Mo user supplied must be pre-approved
8. Tufts supplied precursors – Al2O3, ZnO, user supplied must be pre-approved
9. Offline
10. Tufts supplies Parylene C dimer
11. Standard Si or glass wafers. GaAs or other please contact us
12. These rates will be in effect beginning May 1, 2025