James Vlahakis

James Vlahakis

Tufts Micro/Nanofabrication Lab, Room 2612
200 Boston Avenue, Medford, MA
Research/Areas of Interest:

Micro/nano fabrication with a particular focus on process development, chemical mechanical planarization and tribology, surface science, Ion beam application


PhD, Mechanical Engineering, Tufts University, 2008

SM, Mechanical Engineering, Harvard University, 2003

BS, Mechanical Engineering, Tufts University, 1988


James Vlahakis earned his PhD and BS in mechanical engineering from Tufts University and his MS in mechanical engineering from Harvard. He returned to Tufts from his role as a process development engineer at Intel Corp. He has experience in academic, industrial and government environments, in a number of areas – micro and nano fabrication, ion beam operations and applications and medical device testing and regulation. The Tufts Micro/Nano Fabrication Lab is a multi-user, multi-PI, multi department core facility that enables micro/nano scale research for all Tufts campuses and Vlahakis is responsible for all operational aspects of the facility. In addition, he regularly contributes to micro/nano research programs that cross numerous fields, like flexible devices, MEMS sensors, and bio-optics, among others.

Teaching/Courses Taught

Microfabrication in Practice